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| Engineering | Purpose/device | Recommended material | Product properties |
|---|---|---|---|
| Photolithography | |||
| photoresist coating & developing | valves tube sealtank | FFKM(Black) FFKM(White) | Best heat resistance and excellent chemical resistance |
| etching/ashing | |||
| wet process | filters, | FFKM(Black) FFKM(White) | Best heat resistance and excellent chemical resistance |
| dry process ashing | gate valve chamber lid | FFKM(Black) FFKM(White) | Best heat resistance and excellent chemical resistance |
| diffusion | |||
| furnace lamp anneal | FFKM(Black) | Best heat resistance | |
| thin film | |||
PVC | chamber seal slit valve chamber lid | FFKM(Black) FFKM(White) | Best heat resistance and excellent chemical resistance |
| implantor | |||
| chamber seal | FFKM(Black) FFKM(White) | Best heat resistance and excellent chemical resistance | |
