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| 工程 | 用途/裝置 | 推薦材料 | 產品特性 |
|---|---|---|---|
| Photolithography | |||
| photoresist coating & developing | valves tube sealtank | FFKM(Black) FFKM(White) | 最佳耐熱特性& 優異的抗化學特性 |
| etching/ashing | |||
| wet process | filters, | FFKM(Black) FFKM(White) | 最佳耐熱特性& 優異的抗化學特性 |
| dry process ashing | gate valve chamber lid | FFKM(Black) FFKM(White) | 最佳耐熱特性& 優異的抗化學特性 |
| diffusion | |||
| furnace lamp anneal | FFKM(Black) | 最佳耐熱特性 | |
| thin film | |||
PVC | chamber seal slit valve chamber lid | FFKM(Black) FFKM(White) | 最佳耐熱特性& 優異的抗化學特性 |
| implantor | |||
| chamber seal | FFKM(Black) FFKM(White) | 最佳耐熱特性& 優異的抗化學特性 | |
