FFKM is perfluoroelastomer. KTSEAL has successfully developed KTseal R, the first national perfluoroelastomer special for high technology in 2000. In addition to the same superior chemical resistance with Teflon and viton, KTseal R’s heat resistance is also superior to general viton, and it also has elasticity, which make it a revolutionary product.

As to chemical resistance, it shows stability in ethers, amine compounds, ketones, oxidizing agents, organic solvents, fuels, acids, alkalis and other conditions which are unsustainable for general viton, and it has excellent stability against almost all chemicals. In terms of heat resistance (taking JIS K6301 and other compression deformation test results as the criteria), it can relatively maintain the physical property of rubber in approx. 300℃.

Therefore, when FFKM parts are used in the sealing materials for manufacturing semiconductor devices, they will:

• Lengthen the service life of sealing

• Improve the qualification rate of semiconductor products

• Reduce the maintenance cost

• Reduce the pollution